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Wall Conditioning on HL-1M

Wall Conditioning on HL-1M
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摘要 The wall conditioning methods including DC glow discharge, boronization and sil- iconization on HL-1M are reviewed. The DC glow discharge with helium is routinely used to decrease impurities and recycling. The DC glow discharge is also used for wall boronization or siliconization and the removal of coated film. Siliconization is highlighted for the improvement of performance on HL-1M. The wall conditioning methods including DC glow discharge, boronization and sil- iconization on HL-1M are reviewed. The DC glow discharge with helium is routinely used to decrease impurities and recycling. The DC glow discharge is also used for wall boronization or siliconization and the removal of coated film. Siliconization is highlighted for the improvement of performance on HL-1M.
出处 《Plasma Science and Technology》 SCIE EI CAS CSCD 2001年第6期1063-1068,共6页 等离子体科学和技术(英文版)
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