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A NEW ALGORITHM FOR ELIMINATING PHASE-SHIFT ERROR IN PHASE SHIFTING INTERFEROMETRY

A NEW ALGORITHM FOR ELIMINATING PHASE SHIFT ERROR IN PHASE SHIFTING INTERFEROMETRY ①
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摘要 The effect of phaseshift error in phase shifting interferometry is investigated. A new algorithm with two sets of 4 samples for eliminating phase shift error is presented. The computer simulation and experiment result show that the phase shift offset should be π when the algorithm is used, and this algorithm has gotten better result than the original 4 sample algorithm. The effect of phaseshift error in phase shifting interferometry is investigated. A new algorithm with two sets of 4 samples for eliminating phase shift error is presented. The computer simulation and experiment result show that the phase shift offset should be π when the algorithm is used, and this algorithm has gotten better result than the original 4 sample algorithm.
出处 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 1999年第2期51-55,共5页 中国机械工程学报(英文版)
关键词 Phase shifting interferometry Error compensation Profile measurement Phase shifting interferometry Error compensation Profile measurement
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