RFCVD法沉积类金刚石膜的研究

Study of the diamond like carbon films produced by RFCVD deposition technology

研究了利用RFCVD技术，在铝片等基体表面沉积类金刚石膜。对膜的硬度、电阻率、附着力进行分析发现，在合适的气体流量比和射频功率密度下，这些性能可显著提高。

By RFCVD deposition technology,diamond like carbon films on the Al and other Substracts were producted. when we had analysed the hardness,resistivity,adhesion of the DLC films,we found that those of the films were improved remarkably under the condition of the proper radio frequency power densities and vaper flow ratio