摘要
Investigation of the propagation of the wave in SAW sensors is a basis for the research and design of the sensors. With the advance of the sensor, both the effect of environment on the surface ply and the geometry of waveguide are complicated. To consider the complication, a model with gradient surface ply and multilayer waveguide of SH wave propagation in sensor is proposed. The equation of wave velocity is derived by a transfer matrix method. Through the equation, the function of wave velocity increment via the change of parameters in the surface ply is obtained. The effect of the inhomogeneity on the function is also studied. Finally, some influencing factors of the behavior of the sensor are discussed.
Investigation of the propagation of the wave in SAW sensors is a basis for the research and design of the sensors. With the advance of the sensor, both the effect of environment on the surface ply and the geometry of waveguide are complicated. To consider the complication, a model with gradient surface ply and multilayer waveguide of SH wave propagation in sensor is proposed. The equation of wave velocity is derived by a transfer matrix method. Through the equation, the function of wave velocity increment via the change of parameters in the surface ply is obtained. The effect of the inhomogeneity on the function is also studied. Finally, some influencing factors of the behavior of the sensor are discussed.
基金
This study was supported by the National Natural Science Foundation of China (No. 59635140)
the Doctoral Education Foundation of the Ministry of Education of China
Aeronautics Foundation of China.
