摘要
Implanting 1 ×1016 to1 ×1017 Co+/cm2 into Ni85 Fe15 alloy film anditschangesof mag netoresistantcharacters were researched . The results show that Co+ is very spectacular on modifying Ni85 Fe15 alloyfilm’s magnetoresistancecharacters. Atlower dose,theanisotrop ic magnetoresistivity ratio( AMR) and thesaturated magnetic field didn’tchange almost. ATmedium dose, the saturated magnetic field does not have great change either, butits AMRisraised from 1 % upto 3% . Thisiscomparabletothebest AMRvalueof permalloy based magnetoresistant material prepared by other methods. But the ion implantation tech niqueisrathersimpler. Whentheimplanting doseishigher,its AMRisalsoenhanced notice ably. However,theincreaseof saturated field saysthe material’sstructurecharacters have changed radically.
Implanting 1 ×1016 to1 ×1017 Co+/cm2 into Ni85 Fe15 alloy film anditschangesof mag netoresistantcharacters were researched . The results show that Co+ is very spectacular on modifying Ni85 Fe15 alloyfilm’s magnetoresistancecharacters. Atlower dose,theanisotrop ic magnetoresistivity ratio( AMR) and thesaturated magnetic field didn’tchange almost. ATmedium dose, the saturated magnetic field does not have great change either, butits AMRisraised from 1 % upto 3% . Thisiscomparabletothebest AMRvalueof permalloy based magnetoresistant material prepared by other methods. But the ion implantation tech niqueisrathersimpler. Whentheimplanting doseishigher,its AMRisalsoenhanced notice ably. However,theincreaseof saturated field saysthe material’sstructurecharacters have changed radically.
