利用反应溅射沉积在γ—Al_2O_3粉末上制备TiO_x/γ—A1_2O_3催化剂

PREPARING TiO_x/γ-Al_2O_3 CATALYST ON POWDERYγ-Al_2O_3 BY USINGREACTING SPUTTER DEPOSITION

在微波ECR等离子体中,用平面磁控溅射靶,在γ-Al_2O_2粉末上沉积了TiO_x膜.为了使γ-Al_2O_3颗粒能被TiO_x均匀覆盖,使用了振荡器.文中详细地介绍了实验装置.甲烷转化率,C_2和C_2H_2的产额与选择性的对比结果表明:这种方法制备的催化剂优于传统的化学方法所制备的催化剂,同时也表明振荡器的作用明显.

A layer of TiOx was deposited on powdery γ-Al2O3 by using a flat magnetron sputter target in mi-crowave ECR plasma,and a vibrator was developed to make the γ-Al2O3 particles be evenly coated byTiOx. The experimental device is described in detail in the paper. The contrastive results of methane con-version , yield and selectivity of C2 and C2H2 have shown that the catalyst made by this method is superior tothat by conventional chemical method,and the vibrator is effective.