液浮惯性仪表真空充液工艺流程自动化系统

Automation System of Fluid Fillung Process in Vacuum for the Floated Inertial Sensors

本文通过悬浮对液浮惯性仪表的作用，以及液浮惯性仪表真空充液工艺流程中各节点关键量的控制对液浮惯性仪表的重要性分析，指出真空充液工艺流程自动化的重要性。进而设计出一个液浮惯性仪表真空充液工艺流程自动化系统的硬件和软件组成框图及有关指标和要求，为实际研制提供了有益的依据。

This papet first indicates the importance of the processautomation of fluid filling in vacuum for the floated inertial sensors by introducing the function of the flotation fluid in the sensors and analyzing the importance of the control of the key parameters of each knot in the fluid filling process.The paper then shows hardware and software block diagrams of the automatic fluid filling system with related merits and requirements which are the basis for the practical design.