微机械技术与微传感器发展——21 世纪航天传感器技术展望

The Development of Microtransducer and Microelectronic Machining Technology—A prospect of aerospace transducer technology in 21th century

论述了微机械技术对传感器发展的巨大推动作用及其在航天传感器上的应用前景，并介绍了微机械技术在传感器上近期应用研究的主要内容。

This paper describes the action of MEMS for promoting the transducer development and the application prospect of MEMS in aerospace transducer. Then the recent major research of MEMS application in transducer is discussed.