摘要
介绍了测量菲涅耳微透镜列阵的衍射效率的两种不同方法及其系统,方法简单易行,并实际测试了具有微小单元尺寸的菲涅耳微透镜列阵的衍射效率。
Two different kind of methods for measuring the diffraction efficiency of Fresnel micro lens array and their systems are presented.These methods are simple and can be easily used.The diffraction efficiency of the Fresnel micro lens array with micro element size is practically tested.
出处
《光电工程》
CAS
CSCD
1997年第S1期88-92,共5页
Opto-Electronic Engineering
基金
中国科学院光电技术研究所微细加工光学技术国家重点实验室资助