Epitaxial　Growth　of　YSZ　as　Bufer　Layers　for　High　Tc　Superconducting　Filmson　Si　Substrates

Epitaxial Growth of YSZ as Buffer Layers for High T c Superconducting Films on Si Substrates

Epitaxial films of Yttria Stabilized Zirconia(YSZ) were successfully grown on Si substrates by RF magnetron sputter, the atomic structure and the lattice mismatch of YSZ/Si were presented. Auger electron spectroscopy, X ray diffraction and scanning