摘要
In situ infrared absorption spectroscopy has been measured for a hot filament diamondgrowth process.Absorption of CH<sub>4</sub> and C<sub>2</sub>H<sub>2</sub> species at 3050cm<sup>-1</sup>and 730cm<sup>-1</sup>were detectedrespectively.The absorption intensity of CH<sub>4</sub> decreases while that of C<sub>2</sub>H<sub>2</sub> increases as fila-ment temperature is raised.The correlation between infrared absorption intensity and dia-mond growth rate or diamond film quality was found.High C<sub>2</sub>H<sub>2</sub> or low CH<sub>4</sub> concentration inthe reaction region leads to high quality diamond film growth and high growth rate.
In situ infrared absorption spectroscopy has been measured for a hot filament diamond growth process. Absorption of CH4 and C2H2 species at 3050 cm-1 and 730 cm-1 were detected respectively. The absorption intensity of CH4 decreases while that of C2H2 increases as filament temperature is raised. The correlation between infrared absorption intensity and diamond growth rate or diamond film quality was found. High C2H2 or low CH4 concentration in the reaction region leads to high quality diamond film growth and high growth rate.
基金
Supported by the High Technology Research and Development Programme of China.
