微硅加速度计的超精细加工

Super-Fine Processing in Silicon Microaccelerometer

本文讨论了各向异性腐蚀的机理；硅的各向异性腐蚀设计；双面光刻等与微硅加速度计有关的超精细加工问题。

The mechanism of anisotropic etching the construction design of silicon anisotropic etching and two-side etching technology to produce microaccelerometer have been discussed in the paper.