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Mass Transport of β-Diketonate Precursors for MOCVD of YBa_2Cu_3O_(7-δ) High T_c Superconducting Thin Films

Mass Transport of β-Diketonate Precursors for MOCVD of YBa_2Cu_3O_(7-δ) High T_c Superconducting Thin Films
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摘要 Mass transport of Y(dpm)2 Ba(dpm)5· OH· 2Ho and Cu (dpm)2 by a carrier gas(argon) was theoretically considered and experimentally studied as a function of the system with operating parameters including temperature, carrier gas flow rate and system pressure. The experimental results are in a good agreement with the theoretical prediction. The mechanism of mass transport of these organometallic precursors and their use for YBCO film stoichiometry control and reproducibility are discussed. Mass transport of Y(dpm)2 Ba(dpm)5· OH· 2Ho and Cu (dpm)2 by a carrier gas(argon) was theoretically considered and experimentally studied as a function of the system with operating parameters including temperature, carrier gas flow rate and system pressure. The experimental results are in a good agreement with the theoretical prediction. The mechanism of mass transport of these organometallic precursors and their use for YBCO film stoichiometry control and reproducibility are discussed.
出处 《Chemical Research in Chinese Universities》 SCIE CAS CSCD 1996年第1期92-101,共10页 高等学校化学研究(英文版)
关键词 MOCVD High T_c thin films β-Diketonate precursor Vaporization rate Mass transport MOCVD, High T_c thin films, β-Diketonate precursor, Vaporization rate, Mass transport
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