摘要
微电子集成电路工艺模拟系统SUPREM及半导体器件特性模拟系统SEDAN是微电子CAD系统中的核心内容,也是我国微电子工业技术环节中的一个薄弱环节.本文较全面地介绍了微电子工艺模拟及半导体器件模拟的PC实用系统和有关应用方面的研究.特别是SUPREM同SEDAN的接口联机模拟,极大地增强了模拟信息量.最大限度地实施了以上两系统的模拟功能.
PC-SUPREM and PC-SEDAN are the core of CAD system of microelectronics , are also the weak link of microelectronic industries in china. Some studies of author are discussed. Also, PC-SUPREM, PC-SEDAN and its application of microelectronic are overall introduced. Simulation for connection of SUPREM and SEDAN with computers is emphasized, so that amount of simulation information is extremely enhanced, and function of simulation of two svstems above is extremelv carrved out.
出处
《济南大学学报（社会科学版）》
1995年第1期79-82,共4页
Journal of University of Jinan:Social Science Edition
关键词
微电子
集成电路
工艺模拟
Microelectronic
Integrated circuits
Technique simulation
