摘要
It is reported that the As(III) scavenging bromine reaction rate constant can be determined by means of measuring the limiting current of a rotating disk electrode (RDE).The As(III) scavenging bromine second order reactionrate constants in sulfuric acid are 3.6×10￣5Lmol￣-1.s￣-1 at 20℃ and 8.9×10￣5Lmol￣-1s￣-1at 41℃ respectively. The activation energy is 33 KJ.mol-1.The results showsthat As (III) can be used as scavenging etchant of bromine in submicrometerand three-dimension lithography.
It is reported that the As(III) scavenging bromine reaction rate constant can be determined by means of measuring the limiting current of a rotating disk electrode (RDE).The As(III) scavenging bromine second order reactionrate constants in sulfuric acid are 3.6×10￣5Lmol￣-1.s￣-1 at 20℃ and 8.9×10￣5Lmol￣-1s￣-1at 41℃ respectively. The activation energy is 33 KJ.mol-1.The results showsthat As (III) can be used as scavenging etchant of bromine in submicrometerand three-dimension lithography.
