挠性接头细颈尺寸在线测量技术的研究

Research on a Technology for Measuring the Thin Neck Size of Flexible Joint On-Line

基于差压式气动测量原理，将气动测量技术、新型传感器技术和电子技术等有机结合在一起，解决了惯性器件中典型关键元件─挠性接头的细颈尺寸的在线停车测量问题。测量分辨率为０．１μｍ，测量精度优于０．５μｍ。

It Combines the Pneumatic measurement technology with the new type traneducer and electronic technology organically based on differential pressure pneumatic measurement principle. The problem of cutting stop on-line measurement of the flexible joint thin neck size is solved, which is a typical key element of inertial components. The measurement resolution is 0.1μm, the measurement precision is better than 0.5μm.