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Study on Ferroelectric PLZT Thin Films Prepared by rf Magnetron Sputtering 被引量:1

Study on Ferroelectric PLZT Thin Films Prepared by rf Magnetron Sputtering
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摘要 Due to many particular characteristics of ferroelectric thin films, such as ferroelectric switching characteristics, piezoelectric effect, pyroelectric effect,electrooptic and sound-optic effect, nonlinear optics effect, etc., ferroelectric thin films have wide applications in microelectronics and optocelectronics. Especially success in ferroelectric memory based on ferroelectric thin films, which show good properties
出处 《Chinese Science Bulletin》 SCIE EI CAS 1994年第18期1507-1510,共4页
关键词 rf MAGNETRON SPUTTERING FERROELECTRIC THIN film microstructure electrical properties. RF MAGNETRON SPUTTERING FERROELECTRIC THIN FILM MICROSTRUCTURE ELECTRICAL PROPERTIES
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