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Study of the Interface Between Diamond Film and Si Substrate

Study of the Interface Between Diamond Film and Si Substrate
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摘要 In the recent decade, vapor synthesis of the diamond film has made great ad-vances. The diamond films have been at the initial stage of large-scale application,but the growth mechanism and relationship between the film structure and synthesisconditions have not been fully understood. Though diamond films can be synthesizedon many kinds of substrates, they adhere to substrates very weakly under some condi-tions. Therefore, it is important to investigate the interface state between
出处 《Chinese Science Bulletin》 SCIE EI CAS 1994年第9期711-714,共4页
基金 Project supported by the National Natural Science Foundation of China.
关键词 DIAMOND FILM SI SUBSTRATE INTERFACE adhesion. DIAMOND FILM SI SUBSTRATE INTERFACE ADHESION
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