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Synthesis of High Quality Diamond Film by DC Arc Discharge Plasma Chemical Vapor Deposition 被引量:1

Synthesis of High Quality Diamond Film by DC Arc Discharge Plasma Chemical Vapor Deposition
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摘要 Diamond film is one of the special function materials in high technological area.There is an intense competition in the preparing methods and applications of dia-mond film. The successful synthesis of diamond film opens vast vistas for theapplication of diamond’s unique properties such as high thermal conductivity, highelectrical resistance, good optical transmission, extreme hardness and so on. So far,
出处 《Chinese Science Bulletin》 SCIE EI CAS 1994年第3期236-239,共4页
关键词 DIAMOND FILM DC ARC DISCHARGE CVD. DIAMOND FILM DC ARC DISCHARGE CVD
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同被引文献10

  • 1Show, Y,Nakamura, Y,Izumi, T. et al.Formation of paramagnetic defects in CVD diamond films (ESR study). Thin Solid films . 1996
  • 2Tzeng, Y,Phillips, R.High Quality Flame Deposited Diamond Films for Infrared Optical Windows. Applications of Diamond Films and Related Materials . 1991
  • 3Show, Y,Iwase, M,Izurni, T.Structural characterization of CVD diamond films using the ESR method. Thin Solid films . 1996
  • 4Hartnett, T.M,Miller, R.P.Potential limitations for using CVD diamond as LWIR windows. Proceedings of SPIE the International Society for Optical Engineering . 1990
  • 5Curtis, E Jo,Wayne, A. W,Daniel, C . H.Characterization of diamond films by thermogravimetric analysis and infrared spectroscopy. Mat. Res . Bull . 1989
  • 6Bi, X.X,Eklund, P.C,Zhang, J.G. et al.Optical properties of chemical-vapor-deposited diamond films. Journal of Materials Research . 1990
  • 7Wang X H,Pilione L,Zhu W,et al.Infrared optical properties of CVD diamond films. Journal of Materials Research . 1990
  • 8Seal,M.van Enckevort, W.J.P. Diamond optics, in Proc. Proceedings of SPIE the International Society for Optical Engineering . 1988
  • 9Gheeraert E,Deneuville A.IR characterization of diamond films on Si substrates. Diamond and Related Materials . 1992
  • 10Claude,A.K.Diamond windows for IR applications in adverse environments. Diamond and Related Materials . 1993

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