退火对氮离子注入F_e—T_i样品的性能影响

The Effect of Vacuum Annealing on the Properties of the ion Implanted Fe-Ti Samples

在离子注入刚结束时，氮离子注入纯铁镀钛样品表面并没有氮化钛化合物的出现。经不同温度的真空退火后，样品表面形成了氮化钛化合物，从而引起样品表面颜色和硬度的变化。原因是退火引起注入离子的扩散和再分布，扩散中氨化钛化合物形成于样品的表面。

The nitrogen ion implanted Ti-layer coated iron samples were studied during vacuum annealing. Obviously changes in the surface color ,microhardness of the samples and depth distribution of the impianted ions were observed when the samples were annealed to various temperatures. These changeswere suggested to be the results of the diffusion of the implanted nitrogen ions and the formation of TiN compound.