摘要
ＣａｌｉｂｒａｔｉｏｎｏｆｔｈｅＷｉｄｔｈｏｆＭｉｃｒｏ－ＳｔｅｐｗｉｔｈＴｗｏ－ＭｏｄｅＬａｓｅｒＨｅｔｅｒｏｄｙｎｅＩｎｔｅｒｆｅｒｏｍｅｔｅｒ￥（赵慧洁）（李鹏生）（强锡富）（张琢）ＺＨＡＯＨｕｉｊｉｅ；ＬＩＰｅｎｇｓｈｅｎｇ；ＱＩＡＮＧＸｉｆ...
A computer-aided heterodyne interferometer which can achieve high precision measurement for the shape of micrograph is introduced. Laser common-path heterodyne interferometer and precise phase measuring techniques are used-Besides, in lateral positioning, the mathematical expression of interference signal at the edge of the micrograph is derived on considering that the laser beam has certain radius and its distribution conforms to Gaussian distribution. Because the method of least squares is used, the system can measure with high precision not only the height but also the width. The precision of height measurement is of the order of nm.The precision of width measurement is better than 0.1μm.
