摘要
ＴｈｅＥｘｐｅｒｉｍｅｎｔａｌＳｔｕｄｙｏｆＭｉｃｒｏ－ＴｏｏｌＳｅｒｖｏｗｉｔｈＥｌｅｃｔｒｏｓｔｒｉｃｔｉｖｅＡｃｔｕａｔｏｒ￥（王晓慧）（袁哲俊）（张广玉）ＷＡＮＧＸｉａｏｈｕｉ；ＹＵＡＮＺｈｅｊｕｎ；ＺＨＡＮＧＧｕａｎｇｙｕ（Ａｎａｌｙｓｉｓ...
An experimental study of micro-tool servo with electrostrictive actuator is presented.The design methods as well as the performance of the entire mechanism is given out.The results of the experiment show that the resolution of the micro-tool servo is 0.02μm and the frequency response is up to 200Hz,which satisfies the requirements of the ultra-precision machining.
