组合材料芯片技术及其应用

Combinatorial material chip technology and its applications

组合材料芯片技术是用一系列掩膜在同一块基片上获得含不同参数单元样品面阵的方法 .文章介绍了它在量子阱特性、碲镉汞零偏电阻值、三元合金制备、半导体深能级捕获截面的研究以及在波分复用器件、滤光片式分光元件制作方面的一些新应用 .作为一种新的材料功能操控或制备技术 ,它在研究材料性质变化规律、建立材料性能数据库、筛选优良材料和制作面阵型元件等方面表现出高效。

Combinatorial material chip technology provides a new way to fabricate multi-element arrays with different parameters on the same substrate by using a series of masks. Its applications in studies of the properties of quantum wells, the zero bias resistance of HgCdTe, the preparation of semiconductor alloys and the carrier capture cross-section as well as the manufacture of wavelength division multiplexing devices and super-narrow filters are presented. The technology can provide a highly efficient and systematic way to investigate the properties of materials, establish data librarics, select material and fabricate array cells.