摘要
By means of EPMA,SIMS and XTEM tech- niques,the element distribution at the transition zone of Y-modified ion plated titanium and titanium nitride film on A3 steel substrate and the variation of the element content on the surface of the evaporation source before and after service were studied in detail.A mode was proposed in terms of preferential evaporation and micro-tunnel trans- portation of Y at the interface of film/substrate.
By means of EPMA,SIMS and XTEM tech- niques,the element distribution at the transition zone of Y-modified ion plated titanium and titanium nitride film on A3 steel substrate and the variation of the element content on the surface of the evaporation source before and after service were studied in detail.A mode was proposed in terms of preferential evaporation and micro-tunnel trans- portation of Y at the interface of film/substrate.
