摘要
One-dimensional artificial scattering planes can form in the direction perpendicular to the surface of the films when the compositional modulation period is shorter. Similar to real crystal lattice planes, these artificial scattering planes produce Bragg diffraction with X-ray radiation. Since the modulation period is longer than the general lattice period, the Bragg diffraction peak appears at the position of lower angle (2θ is generally lower than 10°). The diffraction peaks produced by compositional modulation are called modulation peaks.
