摘要
Proton elastic scattering at energies around 2.0 MeV was used to determine the concentration of oxygen in a Y-Ba-Cu-O compound, nitrogen in a TiN film on steel substrate, and carbon and oxygen in a thin Mylar film. Proton scattering from light elements in this energy range exhibits non-Rutherford scattering cross section, which is enhanced by a factor of 4 to 7 relative to the Rutherford scattering cross section. Thus the sensitivity for the light element detection is considerably larger than that obtained by He^+ ion scattering. Quantitative analysis by proton scattering is discussed and compared with other methods.
Proton elastic scattering at energies around 2.0 MeV was used to determine the concentration of oxygen in a Y-Ba-Cu-O compound, nitrogen in a TiN film on steel substrate, and carbon and oxygen in a thin Mylar film. Proton scattering from light elements in this energy range exhibits non-Rutherford scattering cross section, which is enhanced by a factor of 4 to 7 relative to the Rutherford scattering cross section. Thus the sensitivity for the light element detection is considerably larger than that obtained by He^+ ion scattering. Quantitative analysis by proton scattering is discussed and compared with other methods.
