High Resolution Tunneling Microscopies:from FEM to STS

Field cmission microscopy, field ion microscopy and scanning tunnelingmicroscopy realized atomically high resolutions utilizing electron tunneling and confining atunneling region into an atomically small spot. These microscopies have other unique fea-tures: the energy analyses of tunneling electrons by a field emission microscope (FEM)and a scanning tunneling microscope (STM), i. e., field emission electron

Field emission microscopy, field ion microscopy and scanning tunneling microscopy realized atomically high resolutions utilizing electron tunneling and confining a tunneling region into an atomically small spot. These microscopies have other unique features: the energy analyses of tunneling electrons by a field emission microscope (FEM) and a scanning tunneling microscope (STM), i. e., field emission electron spectroscopy (FEES) and scanning tunneling spectroscopy (STS), respectively, and the mass analysis of individual surface atoms by a combined instrument of a field ion microscope (FIM) and a mass spectrometer, the atomprobe (A-P) . FEES and STS provide information on the electronic states of specimen surfaces and the A-P clarifies the surface composition in atomic dimension. The present study suggests that the unification of A-P/ FEES and STM / STS would lead to a new approach for reliable ultramicroscopic analysis of solid surfaces.