摘要
本文介绍了采用电容传感器测量微小孔径表面粗糙度的原理和方法;并将测量结果用表面粗糙度评定参数R,来表示。
The articles introduce the principles and the methords. Which ?.dopt electric capacity sensor to measure surface of small bore diamater and use the evaluate parameter 'Ry' to indicate the result of the measurement.
出处
《合肥工业大学学报(自然科学版)》
CAS
CSCD
1992年第S1期27-31,共5页
Journal of Hefei University of Technology:Natural Science