摘要
Ⅰ. INTRODUCTION It has been proved that YBa<sub>2</sub>Cu<sub>3</sub>O<sub>7-x</sub> superconducting thin films can be epitaxially grown on SrTiO<sub>3</sub> by dc magnetron sputtering method with good lattice match along the axes However, for the epitaxial growth of YBa<sub>2</sub>Cu<sub>3</sub>O<sub>7-x</sub> superconducting thin film on Zr(Y)O<sub>2</sub>, its[100] direction is parallel to the[110] direction of Zr(Y)O<sub>2</sub> in stead of the lattice matching along the axes, which is due to the big mismatch between YBa<sub>2</sub>Cu<sub>3</sub>O<sub>7-x</sub>