摘要
This paper studies gas detectors, especially, gas sensors in which a thermochemical reac-tion takes place on a catalytic element. The novel catalytic sensor is fabricated using micro-electronic thick-film techniques, and it is used to monitor the concentration of combustiblegases and their mixture in a flow reactor. This sensor has two identical platinum films whichare used as the heater, resistance thermometer and the surface of reaction. Catalyst of palla-dium is deposited on one of the platinum film by chemical method, while the other platinumfilm serves as a compensating element. The difference in the minimum reaction temperaturefor the catalytic oxidation of the combustible gas components of mixture by palladium sug-gests that it is possible to analyse such a gas mixture. The purpose of the study is to demon-strate that the sensor fabricated by this process has good sensing characteristics for hydrogenor carbon monoxide gas in the mixture of methane and ethane.
This paper studies gas detectors, especially, gas sensors in which a thermochemical reac-tion takes place on a catalytic element. The novel catalytic sensor is fabricated using micro-electronic thick-film techniques, and it is used to monitor the concentration of combustiblegases and their mixture in a flow reactor. This sensor has two identical platinum films whichare used as the heater, resistance thermometer and the surface of reaction. Catalyst of palla-dium is deposited on one of the platinum film by chemical method, while the other platinumfilm serves as a compensating element. The difference in the minimum reaction temperaturefor the catalytic oxidation of the combustible gas components of mixture by palladium sug-gests that it is possible to analyse such a gas mixture. The purpose of the study is to demon-strate that the sensor fabricated by this process has good sensing characteristics for hydrogenor carbon monoxide gas in the mixture of methane and ethane.
基金
Project supported by the National Natural Science Foundation of China and the Edison Sensor Tech. Center, Dept of Development of the State of Ohio, USA.
