摘要
本文介绍了压电石英晶体谐振器测量沉积膜厚度及速率的工作原理。根据石英晶体和沉积膜的切变模型弹性声阻抗理论,严格推导出了沉积一种材料膜时组合系统的谐振频率变化与沉积层材料声阻抗之间的最正确的理论关系式,并且进而导出了沉积多种材料膜系时的非常有用的正确关系式。这些关系式为认识和使用石英谐振器粘确监测沉积膜提供了科学依据。
The operative principle of the determination of the thickness of the deposited film andthe speed for piezoelectric quartz crystal resonators is presented. Based on the theory of theshear-mode clistic acoustic impedance of quartz and the deposited film an equation which isnow the best theoretical formula relating the resonant frequency shift of the quartz-filmcomposite acoustic system to the mass and acoustic impedance of a singly deposited materialcan be deri ed. Furthermore, the equations, which are of great worth to applications, for asequence of deposited films of various materials can also be derived. These equations willproxide a scientific basis for accurate determination.
出处
《真空科学与技术学报》
EI
CAS
CSCD
1991年第1期6-9,共4页
Chinese Journal of Vacuum Science and Technology
