真空镀膜与LB薄膜技术相结合制备多层膜软X光反射镜

PREPARATION OF SOFT X-RAY MULTILAYER BY COMBINING PVD AND LB TECHNIQUES

X光光学近年来有极大的发展,其重要原因是多层膜软X光反射镜的研制成功。这种反射镜,一般用物理汽相淀积方法蒸镀无机材料而得的多层结构。我们采用真空镀膜与LB薄膜技术相结合的方法成功地制备了一些无机材料与有机材料交替的多层结构,证明了它们具有厚度精确易控、吸收少、界面光滑及反射率高等优点。

X-ray optics has recently been developed rapidly. An important reason of that is the sue-cessful fabrication of soft X-ray mirrors which are usually inorganic multilayers made byphysical vapor deposition. We have obtained some inorganic/organic multilayers by the methodof PVD combined with Langmuir-Blodgett technology.It has been shown that these hybrid mul-tilayers have the advantages of easier thickness-control, less absorption, smoother interfacesand higher reflectivity.