离子束动态混合形成非晶膜及其特性研究

STUDIES ON THE AMORPHOUS FILM FORMED BY DYNAMIC BEAM MIXING AND ITS CHARACTERISTICS

同时用离子溅射及高能离子轰击相结合的离予束动态混合技术,直接在轴承钢GCr15衬底土制备富Ta表面合金。适当控制沉积温度及原子·离子到达比,可形成一定组分的非晶合金膜。分别用TEM、EDAX与XPS观察膜的结构与其所含主要成分。在NaCl、H_2SO_4溶液中检验了膜的抗局部腐蚀和均匀腐蚀能力。通过硬度测试、摩擦、磨损试验考查了膜的机械性能。实验表明,用此工艺形成的GCrl5-Ta非晶合金膜,具有优良的化学性质和物理性质。在盐溶液中的自腐蚀电位、点蚀电位和保护电位均明显上升,在酸溶液中的极化电流密度降低2～3个数量级,钝化区大大扩大。

A Ta-rich surface alloy has been prepared directly on the GCr15 bearing steelsubstrate by dynamic ion beam mixing technique which combines the ion sputte-ring deposition with the high energy ion bombardment. The amorphous alloy filmof a given composition may be formed when deposition temperature and atom / ionarrival ratio are controlled appropriately. The microstructure and the main compo-sition of the intermixed layer were examined using TEM, EDAX, and XPS, respec-tively. The film has undergone the test for resistance to uniform and local corrosions,in H_2SO_4 and NaCl solutions. Its mechanical properties were examined by hardnessfriction and wearing tests. The experiments have shown that the amorphous GCr15-Ta alloy film formed by this technique has superior chemical and physical proper-ties.