列阵式二维硅V形槽的研制与应用研究

The fabrication and applications of arrays Two-dimensional silicon V-grooves

详尽介绍了采用硅各向异性腐蚀技术制备列阵式二维硅V形槽的工艺,探讨了此V形槽在光纤列阵与波导耦合及光纤列阵之间耦合中的应用。实验结果表明,使用此V形槽,Ti扩散LiNbO_3平面波导与单模光纤的耦合效率达到了60％。

A technology for the fabrication of novel arrays Two-dimensional silicon is described in detail. The application of this V-grooves used for the coupling of arrays optical fibers to channel waveguide, or between array optical fibers is developed. The experimental results indicate that,using this V-grooves, the coupling efficiency of Ti-diffused LiNb03 plane waveguides with single-mode fibers attained to 60%.