摘要
本文从光波传播理论出发,运用近代光学和几何光学原理讨论了广义TALBOT 效应;用莫尔偏转技术讨论了 TALBOT 干涉仪原理;以此建立了测量微小的 TALBOT 干涉仪数学、物理模型。比对测量表明测量原理正确、可靠。
Based on the principles of contemporary and geometrical optics,the presented work deals with the generalized Talbot effect and the principle of the Talbot interferometer by using of the- ories of the optical propagation and the Moire deflection.Then,the mathematical and physical mod- els of the Talbot Interferometer are developed for the applocation of small displacement measure- ments.The measuring principle of this system has been verified by comparison experiments.
出处
《中国计量学院学报》
1991年第1期72-78,共7页
Journal of China Jiliang University
关键词
干涉仪
莫尔技术
微小位移测量
interferometer
Moire technology
small displacement measurement