摘要
The Cu/a-C:H bilayer films,grown far from the equilibrium,have the network fractal struc- ture.Their fractal dimension value D_f=1.83.An in-situ dynamic observation of these films under TEM at slowly heating rate revealed that the initial network fractal structure was dam- aged gradually and broken down completely at 535℃.And as the annealing-induced aggregation developed,the random dispersed aggregates formed gradually,the fractal dimen- sion of the new structure decreased with increasing annealing temperature.Finally,D_f=1.63 at 850℃.Based on the surface and interface diffusion model of the metallic atoms,the varia- tion of the structural character could be explained.
The Cu/a-C:H bilayer films,grown far from the equilibrium,have the network fractal struc- ture.Their fractal dimension value D_f=1.83.An in-situ dynamic observation of these films under TEM at slowly heating rate revealed that the initial network fractal structure was dam- aged gradually and broken down completely at 535℃.And as the annealing-induced aggregation developed,the random dispersed aggregates formed gradually,the fractal dimen- sion of the new structure decreased with increasing annealing temperature.Finally,D_f=1.63 at 850℃.Based on the surface and interface diffusion model of the metallic atoms,the varia- tion of the structural character could be explained.
