摘要
本文研究了离子注入对铍表面硬度及磨损性能的影响,用x射线分析了注入后的表面结构。结果表明,离子注入对铍表面的磨损性能有很大改善,硬度得到提高,耐磨层深度是注入离子射程的10倍。并讨论了离子注入改善表面磨损性能及硬度提高的机理。
In this paper, we have studied the effect of ion implantation on the hardness and wear property of beryllium sur-face. The experimental results show that the ion implanted surfaces have higher hardness with anti-wear layers of certaindepth. The depth of the anti-wear layer is ten times of the ion implanted depth. The mechanism of ion implantation inimproving the hardness and wear property of the surface is discussed.
出处
《真空科学与技术学报》
EI
CAS
CSCD
1991年第4期238-240,222,共4页
Chinese Journal of Vacuum Science and Technology
基金
中关村测试基金的资助
