双离子束法淀积类金刚石碳膜的结构特征

STRUCTURAL CHARACTERISTICS OF DIAMOND-LIKE CARBON FILMS DEPOSITED BY DUAL ION BEAM METHOD

用双离子束法在低于50℃的单晶硅、玻璃、钼和不锈钢表面淀积了类金刚石碳膜。考察了多种工况下淀积膜的表面形貌、TED花样和Raman谱,表明这种膜是键参数有变化的由sp^3键和sp^2键混合组成的非晶态碳结构,其表面和内部还随机散布有立方金刚石微晶。本文还结合该膜电阻率和红外吸收谱的测试结果,分析讨论了离子辐照能量、离子密度、工质气体成分和基底材料对膜结构的影响。

The deposition of DLC films on Si,Mo,stainless steel and glass substrates is carried out at temperatures below 50℃using dual ion beam sputtering method. The investigation on the surface morphology,the TED patter and the Raman spec-tra of the DLC films deposited under various conditions has shown that the DLC films are amorphous structure of themixture of sp^2 and sp^3 with changed bond parameters. The grains of microcrystal cubic diamond were randomly dispersedon the surface and in the bulk of the DLC films. The effect of ion energy,density, working gases and substrate materialson the structure of the DLC films is discussed in terms of the measured results of resistivities and infrared absorption spec-tra for the DLC films.