摘要
用射频辉光放电离解烃制备了类金刚石碳膜。由IR、XPS、AES、Raman、SEM、TEM、TED和元素分析等手段,分析表征了膜的组成、碳原子化学键态和晶形结构。表明膜是sp^3C-C和C-H键为主体的非晶态,在非晶碳基质中存在一定的微晶石墨和金刚石成分。
Diamond-like carbon (DLC) films were prepared by decomposition of hydrocarbons in RF glow discharge. Film
structure was characterized by IR, XPS, AES, RAMAN, SEM, TEM, TED and by elemental anlysis from the angles of
composition, chemical bond state of carbon atom and crystalline structure. The films were found to be amorphous mainly
consisting of sp^3 C-C and C-H bonds. Some microcrystalline graphite and diamond existed in the amorphous matrix.
出处
《真空科学与技术学报》
EI
CAS
CSCD
1991年第6期388-393,共6页
Chinese Journal of Vacuum Science and Technology
基金
中国科学院兰州化学物理研究所固体润滑开放研究实验室资助课题
