共溅射沉积的TbFeCo薄膜

CO-SPUTTERING TbFeCo FILMS

本文介绍了利用射频共溅射技术制备垂直膜面单轴各向异性TbFeCo磁光薄膜,并研究了该薄膜的磁、磁光和读写性能。测试结果表明,这种TbFeCo薄膜的磁光盘其载噪比和擦写循环分别达到48dB和1×10~6次以上。该磁光盘可适用于数据存储。

Amorphous TbFeCo magneto-optical films with uniaxial magnetic anisotropy perpendicular to the films plane are prepared by rf co-sputtering technique and magnetic, magneto-optical and read/write properties of the TbFeCo film are studied. As a result, for magneto-optical disks with the TbFeCo film a carrier to noise ratio of 48dB(1μm bit)and an erase/ write cycle of more than 1×10~6 times have been realized. The disk is applicable to date memory.