摘要
本文叙述用平面磁控溅射法在聚酯薄膜上镀制TiO_2/Cu/TiO_2透明热反射膜系,研究了膜厚的确定方法以及克服Cu膜氧化和岛状结构的工艺措施,获得TiO_2/Cu/TiO_2/PET膜系的可见透射率为65%,红外反射率为92%,近红外透射率为25%。
This paper introduces TiO_2/Cu/TiO_2 transparent heat reflecting film system prepared by planar magnetron sputter-ing on a polyester sheet. Detailed design procedures of thickness of Cu and TiO_2 films are given. Technological methods todeal with the problems of oxidation and island structure of Cu are discussed. TiO_2/Cu/TiO_2/PET film system gives visibletransmittance of 65% with an infrared reflectance of 92% and a near infrared transmittance of 25%.
出处
《真空科学与技术学报》
EI
CAS
CSCD
1991年第5期322-328,共7页
Chinese Journal of Vacuum Science and Technology
