摘要
激光气相法是制备超微粉末的新方法之一,目前还存在超微粉末粒径太小难于收集,原料SiH<sub>4</sub>价格较昂贵等困难。我们以SiH<sub>4</sub>为主要原料,成功地合成出超微Si、Si<sub>3</sub>N<sub>4</sub>、SiC粉末,研究了反应条件对超微粉性能的影响,探索了用廉价原料代替SiH<sub>4</sub>的可能性,并且在超微粉的收集方面做了若干探索,取得了一些有意义的结果。
In the present paper, the principles and devices for producting ultrafine powders by laser induced vapor-phase reaction method is presented. The ultrafine powders of Si, Si_3N_4 and SiC is successfully prepared with a 150W CW CO_2 laser as light source and SiH_4 as main raw- material. The influence of experimental conditions on properties of ultrafine powders is investigated. The pooossibility of substitution of cheaper materjals for SiH_4 is also discussed. This study is expected to mave a good prospects in industrial applications.
出处
《化学研究与应用》
CAS
CSCD
1991年第4期74-77,共4页
Chemical Research and Application
关键词
激光化学
超微粉末
合成
Laser Chemistry
ultrafine powder
synthesis
