基于超声振动下电镀金刚石线切割单晶硅材料的实验研究

Study on ultrasonic vibration cutting of monocrystal silicon material with electroplated diamond wire saw

在总结了国内外文献资料的基础上,利用自行制造的完全具有自主知识产权的超声线切割加工机床进行了加工实验,对超声线切割加工机理与工艺进行了深入研究。结果表明:施加超声作用要比普通锯切时的锯切力低,切削效率高,表面粗糙度小,同时利用ABAQUS软件进行有限元仿真分析,进一步研究了电镀金刚石线锯超声振动复合加工锯切技术的工艺规律。

After summarizing both domestic and foreign literature,we implemented machining experiments on ultrasonic wire cutting machine made by ourselves and looked deeply into the mechanism and process of ultrasonic wire cutting. The results showed that ultrasonic vibration could lower the cutting force compared with common cutting. Ultrasonic cutting has higher cutting effeciency with smaller surface roughness. In addition, finite element simulation was done with ABAQUS software to further study the law of ultrasonic vibration cutting technology of electroplated diamond wire saw.