一种新型基于光纤柔性铰链的六维微位姿并联测量平台

A New Parallel Mechanism for 6-DOF Micro Displacement and Orientation Measurement Based on Optical Fiber Flexure Hinges

提出一种集传感和弹性运动副于一体的光纤柔性铰链,并通过光纤柔性铰链构造并联平台,实现六维微位姿的在线检测。这种光纤柔性铰链基于光纤曲率传感器的测量原理,通过检测光纤柔性铰链的角位移来获得微动平台的位置与方向。研究了光纤柔性铰链的位姿测量原理和曲率测量机理,以及直线位移和角位移同光纤柔性铰链曲率的变化关系,分析了传感器各参数对灵敏度的影响;利用光纤柔性铰链灵敏度具有方向性的特点制作六维位姿测量平台,减小传感器的维间耦合;设计了传感器的标定模型及标定方案并通过实验验证。这种六维微位姿测量传感平台具有结构紧凑,测量力小,测量行程大的特点,适合应用于微操作系统中的多维微位姿的在线检测和末端执行器的微位姿闭环控制。

An optical fiber flexure hinge(OFFH) is presented which incorporate sensor with elastic kinematic pair, they are built into a parallel mechanism for in situ 6-DOF micro displacement and orientation measurement. The operation principle is based on bending measurement of flexure hinge itself by curvature optical fiber sensor and transfer the angular displacement of OFFH to the parallel platform's micro position and orientation displacement. The operation principle of OFFH and curvature measurement principle is studied and parameters of optical fiber sensor that in relation to sensitivity are analyzed. The sensitivity of OFFH is in relation to orientation and is used for multi-dimensional measurement decoupling. The calibration model and method is designed and a 6-DOF micro position and orientation measurement experiment system has set up. This new sensor is compact, with wider measurement range and small measurement force, which is suitable for multi dimensional micro operating system in situ micro displacement and orientation close loop control.