强光光学零件加工误差频谱分析与控制方法研究

Study on Spectrum Characteristics and Controlling Method of Machining Errors of Optical Elements Used in High Power Laser System

本文利用功率谱密度分析磁流变抛光表面的敏感频率误差,发现走刀步距与中高频误差具有直接的关联性,通过小波算法确定其分布区域后,采用大束径的光顺抛光法对敏感频率误差进行控制,测试结果表明中高频误差得到了有效控制。本研究对强光光学零件加工误差的频谱分析、表征和控制具有指导意义。

The power spectral density is used to analyze the machining errors with sensitive frequencies. The inherent relationship is found between medium-high frequency errors and the feeding pace in the process of magnetorheological finishing. After the distributing area of sensitive frequency error is located by the wavelet transform algorithm, the surface-smoothing technology is used to reduce sensitive frequency error. The experiment result shows the medium-high frequency errors can be controlled by using this method. The research works can guide the spectrum analyzing, describing and controlling machining errors of optical elements used in high power laser system.