摘要
针对超硬微结构功能表面的ELID磨削技术研究现状进行综述,介绍了超精密磨削技术在超硬微结构光学功能表面加工方面的研究进展,同时也介绍了ELID磨削技术应用于微结构加工方面的研究现状,探讨了采用ELID对超硬微结构光学功能表面进行磨削加工的可行性及面临的问题,并对微结构光学功能表面的ELID加工技术的发展和应用进行预测和建议。
The researches about the ultraprecision grinding of superhard microstructured functional components were reviewed. The research results about the grinding of superhard microstructured functional surfaces and the grinding of microstructures with ELID (electrolytic in-process dressing) were introduced. The feasibility and difficulties of the ELID ultra-precision grinding were presented. The future trends and applications of ELID ultraprecision grinding of superhard microstructured functional molds were discussed.
出处
《航空精密制造技术》
2013年第4期5-9,共5页
Aviation Precision Manufacturing Technology
基金
国家自然科学基金(51075093)资助项目
关键词
微结构
光学功能表面
ELID磨削
超硬材料
microstructures
optical functional surface
electrolytic in-process dressing grinding
super-hard material
