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熔石英光学元件激光阈值提升仿真与工艺研究 被引量：2

Simulation and Techniques Research on Improving Fused Silica Optics' Laser-induced Damage Threshold
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摘要 为实现熔石英光学元件的高激光损伤阈值加工,研究了磁流变抛光+HF酸洗工艺提升阈值的过程。通过磁流变抛光+HF酸洗加工实验、测量表面缺陷形貌演变和有限时域差分算法(FDTD)仿真,认为该工艺改善破碎型缺陷,减弱光场调制作用,实现阈值的提升。 The process of improvement threshold by magnetorheological finishing and HF acid etching was studied for realizing the fused silica optical elements' laser-induced damage threshold(LIDT) machining.By magnetorheological finishing and HF acid etching,measurement surface defects and LIDT simulation,the process improved broken defect,reduced modulated light and improved threshold.
作者 田野 彭小强 石峰 胡皓
机构地区 国防科学技术大学机电工程与自动化学院
出处 《航空精密制造技术》 2013年第5期1-4,共4页 Aviation Precision Manufacturing Technology
基金 国家自然科学基金资助项目
关键词 激光损伤阈值 熔石英 时域有限差分算法 磁流变抛光 laser induced damage threshold fused silica finite difference time domain magnetorheological finishing
分类号 TG580.692 [金属学及工艺—金属切削加工及机床]
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参考文献5

  • 1Bloembergen N. Role of cracks,pores,and absorbing inclusions on laser induced damage threshold at surfaces of transparent dielectrics[J].Applied Optics,1973,(06):661-664.
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同被引文献15

  • 1王涛,赵元安,黄建兵,贺洪波,劭建达,范正修.重复率激光作用下光学薄膜损伤的累积效应[J].强激光与粒子束,2005,17(B04):171-174. 被引量：11
  • 2孔伟金,刘世杰,沈自才,沈健,邵建达,范正修.多层介质膜光栅和介质膜反射镜抗激光损伤阈值研究[J].中国激光,2006,33(4):552-556. 被引量：6
  • 3J.N eauport,P.Cormont,IA~maignere,C.A mbard,F.pilo n,H.B e re e gol. Concerning the impact of polishing induced contamination of fused silica optics on the laser-induced damage density at 351 nm[J]. Optics Communication, 2008 : 3802-3805.
  • 4J.Neauport,P.Cormont,P.Legros,C.Ambard,J.Destribats. Imaging subsurface damage of grinded fused silica optics by confocal fluores- cencemicroscopy[J].Optics Express, 2009,Vol 17,No5, 3543-3554.
  • 5A.K.BurnhanaIAHackelImproving351 -nmDamagePerformance of Large-Aperture Fused Silica and DKDP Optics [C].Proc of SPIE.2002:4679.
  • 6J.Neauport,L.Lamaignere,H.Bercegol. Polishing-induced con- tamination of fused silica optics and laser induced damage den- sity at 351 nm [J]. Optics express, 2005, 13(25):10163-10165.
  • 7H.T.Nguyen,C.C.Larson,J.A.Britten.Improvement of laser dam- age resistanee and diffraction effieieney of muhilayer dieleetrie diffraction gratings by HF-etehbaeklinewidth tailoring[C].LLNL- PROC,2010.
  • 8季桐鼎二次离子质谱与离子探针[M].北京:科学出版社,1989.
  • 9舒勇.熔石英元件损伤可控高效阈值提升工艺关键技术研究[D].长沙:国防科技大学,2013.
  • 10娄俊,苏俊宏,徐均琪,谢松林.He-Ne散射光检测光学薄膜激光损伤阈值[J].应用光学,2008,29(1):131-135. 被引量：13

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航空精密制造技术
2013年 第5期

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