摘要
研究了聚焦离子光学系统设计的基本原理和方法,并在自研的离子光学系统上通过实验验证了设计的可行性。在一块直径为100mm的微晶玻璃上进行了去除函数的性能测试实验。在屏栅电压900eV,屏栅电流25mA,5mm光阑,20mm靶距的条件下获得了3.78mm宽度(FWHM),226nm/min去除量的高斯型去除函数。
The method and principle of focused ion optical system design was researched.Based on the design,the feasibility by the experiment of removal function was proved.A 100mm planar ceramic glass was figured with ion beam.By the parameters of 900ev screen-grid voltage,25mA screen-grid current,5mm beam barrier and 20mm processing range,a Gaussian removal function that has 3.78mm breadth and 226nm/min removal volume was obtained.
出处
《航空精密制造技术》
2013年第5期17-20,8,共5页
Aviation Precision Manufacturing Technology
基金
国家自然科学基金资助项目(51175504)
