基于法拉第杯的离子束抛光机束流密度检测研究

Study on Examination of Ion Beam Density of Ion Beam Figuring Machine Based on Faraday Cup

根据自行研制的法拉第杯对离子束抛光(IBF)机床中离子束束流密度进行检测,通过束流密度检测实验与去除函数实验的对比,验证了该法拉第杯检测离子束束流密度的可行性及有效性。利用该法拉第杯对束流密度与离子束电流的关系进行了初步研究,发现两者之间呈线性关系。应用该法拉第杯可为抛光加工提供离子束定位和束流密度状态的重要参数。

The ion beam density of ion beam figuring (IBF) machine was examined based on the self-developed Faraday cup. The feasibility and effectiveness of Faraday cup on ion beam density examination were proved by comparison between the experiment of beam density examination and removal function experiment.A preliminary study on the relationship between beam density and ion beam electric current was made by using Faraday cup and a linear relationship was found between them.The application of Faraday cup can provide important parameter of the ion beam position and beam density state for the ion beam figuring.