光学元件亚表面损伤深度及形貌研究

Study on subsurface damage depth and morphology of optical elements

根据化学蚀刻法,提出了一种光学元件亚表面损伤的检测方法,分别观测了磨削和抛光后K9玻璃蚀刻后的亚表面损伤。研究表明:光学元件磨削亚表面损伤在光学显微镜下的表现形式为弹坑状缺陷和脆性裂纹;光学元件抛光后也产生了亚表面缺陷,其在AFM下的表现形式为细长条纹状划痕。

In this paper,a detection way of subsurface damage in optical elements was put forward based on the chemical etching method.After grinding and polishing,we observed the subsurface damage of K9 glass under different etching time.The study indicates that the manifestations of the grinding subsurface damage under optical microscope are crater-like defects and brittle cracks;the optical elements also has subsurface damage after polishing,and the polishing subsurface damage under AFM manifests as slender striped scratches.